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Plunger Pump Product List

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Continuous Slurry Supply Device P85

Achieved a cost reduction of over 15% compared to our conventional methods with a patented formulation! It can also be applied to supply uses such as catalyst slurries for fuel cells and secondary batteries!

The "Continuous Slurry Supply Device P85" is a device that supplies slurry applied during the wafer polishing process in semiconductor manufacturing. With the downsizing of the refrigeration unit and heater, the device's volume has been reduced by 61% compared to our conventional models, while the supply flow rate has increased. Additionally, the time required to supply from raw material replenishment has been significantly shortened from 52 minutes to 22 minutes compared to our conventional models. 【Features】 ■ Our unique blending method combines slurry and pure water (patent obtained) → Eliminates the need for a pump, achieving over 15% cost reduction compared to our conventional models. ■ Our proprietary heating method heats the slurry (patent obtained) → Achieves high efficiency and high response heating. *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

  • Other semiconductor manufacturing equipment

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Simple Slurry Supply Device P65

For wafer polishing

This is an experimental supply device for supplying a diluted mixture of slurry liquid from a tank to the equipment. 【Features】 ○ Tank capacity: 125L, ivory PVC ○ Diaphragm pump: 10 liters per minute ○ Supply air: 85 liters per minute ○ Power capacity: AC100V 5A

  • Other semiconductor manufacturing equipment

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CMP slurry supply device P108

This device is designed to continuously supply slurry to a CMP device and has the capability to supply two types through two systems.

This device dilutes the slurry concentrate, supplies the slurry to the polishing equipment, controls the liquid supply temperature and pH value (optional feature), and is equipped with a mixing tank and a supply tank for continuous slurry supply. *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

  • Heating device

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